Interestingly, DUV lithography at a wavelength of 193 nm has dominated the field much longer than originally expected, with a continual series of improvements prolonging its lifespan. The ...

Mitsubishi Electric Corporation (TOKYO: 6503) announced today that it has developed, in collaboration with the Institute of ...

EUV is state-of-the-art, but larger-wavelength DUV and FUV are more than adequate for the billions of microcontrollers made every year. There are myriad applications for chips that do not require ...