Interestingly, DUV lithography at a wavelength of 193 nm has dominated the field much longer than originally expected, with a continual series of improvements prolonging its lifespan. The ...
In collaboration with virologist, Masako Nomaguchi, they investigated inactivation efficacy at three wavelengths — 265, 280, and 300 nanometres using commercially available DUV-LEDs, and ...
DUV technology comes with wavelengths that are much higher than EUV, which is why it’s harder to make more advanced chips with that process. The light used to make chips with DUV has wavelengths ...
EUV is state-of-the-art, but larger-wavelength DUV and FUV are more than adequate for the billions of microcontrollers made every year. There are myriad applications for chips that do not require ...
Our current efforts remain directed toward finding materials or material combinations whose optical and mechanical properties accommodate nanotechnology and short wavelength nanolithography ...