High-resolution X-ray diffraction can be used to optimize ion implantation for 4H-SiC substrates, improving wafer performance ...

Presenting the physics and materials science of ion implantation and ion beam modification of materials, this book covers ion-solid interactions used to predict ion ranges, ion straggling and lattice ...

Townsend, P.D. Zhang, L. and Chandler, P.J. 1994. Extended Short-wavelength Harmonic Production Using a Multilayer Waveguide Structure. Journal of Modern Optics, Vol ...

Description: CoorsTek provides precision measurement components for clean, stable, and contaminant-free performance across temperature and application environments. Ceramic Components for Ion Implant ...

Tilted ion implantation (TII) can be used in conjunction with pre-existing masking features on the surface of a substrate to form features with smaller dimensions and smaller pitch. In this paper, the ...

Mitsubishi Electric Corporation (TOKYO: 6503) announced today that it will begin shipping samples of a silicon carbide (SiC) ...

Axcelis Technologies Inc (ACLS) reports robust Q3 2024 results with $256.6 million in revenue, while navigating softer ...