deep ultraviolet (DUV) wavelength laser system that achieves an output energy of 235 millijoules, the world’s highest class ...

Interestingly, DUV lithography at a wavelength of 193 nm has dominated the field much longer than originally expected, with a continual series of improvements prolonging its lifespan. The ...

The problem is that the next jump in wavelength (by a factor of about 14) from the DUV to the far-shorter wavelength of 13.5 nm in the EUV has proved difficult to achieve, despite years of research.

EUV is state-of-the-art, but larger-wavelength DUV and FUV are more than adequate for the billions of microcontrollers made every year. There are myriad applications for chips that do not require ...

One of the deep ultraviolet (DUV) lithography machines operates at a wavelength of 193 nanometres (nm), with a resolution ...

Our current efforts remain directed toward finding materials or material combinations whose optical and mechanical properties accommodate nanotechnology and short wavelength nanolithography ...