High-resolution X-ray diffraction can be used to optimize ion implantation for 4H-SiC substrates, improving wafer performance ...

Presenting the physics and materials science of ion implantation and ion beam modification of materials, this book covers ion-solid interactions used to predict ion ranges, ion straggling and lattice ...

stable, and contaminant-free performance across temperature and application environments. Ceramic Components for Ion Implant Equipment From precision air bearing components and beams to ultra-flat ...

Townsend, P.D. Zhang, L. and Chandler, P.J. 1994. Extended Short-wavelength Harmonic Production Using a Multilayer Waveguide Structure. Journal of Modern Optics, Vol ...

Tilted ion implantation (TII) can be used in conjunction with pre-existing masking features on the surface of a substrate to form features with smaller dimensions and smaller pitch. In this paper, the ...

Oblique ion implantation instead of conventional vertical ion implantation reduces switching loss. - Power loss is reduced by about 50% compared to conventional planar SiC-MOSFETs, resulting in ...

Axcelis Technologies Inc (ACLS) reports robust Q3 2024 results with $256.6 million in revenue, while navigating softer ...

Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor ...